阳极键合用微晶玻璃的组成与析晶性能

Composition and crystallization of the glass-ceramics used as anodic bonding material

以Li2O-Al2O-SiO2（LAS）系统微晶玻璃为研究对象，目的是开发新型微晶玻璃以代替现有的阳极键合用耐热玻璃。采用传统熔体冷却方法，研究以TiO2，ZrO2和P2O3为晶核剂，以Sb2O3为澄清剂，以含Na20，MgO，ZnO的Li20—Al2O3-SiO2系微晶玻璃为基础组成，采用二步法热处理制度制备出符合阳极键合要求的微晶玻璃材料。利用X射线衍射分析（XRD）、扫描电子显微分析（SEM）等测试技术对微晶玻璃的晶相和显微结构进行了测试与分析。结果表明，微晶玻璃的主晶相为p锂辉石或β-石英固溶体，热膨胀系数为（20．207～31．113）×10^-7℃^-1。

Li2O- Al2O3-SiO2 system glass-ceramics that contains Na20, MgO, and ZnO is studied for the possibility of being used for anodic bonding with silicon. Two-step heat-treatment system is adopted for the production of the glass-ceramics that meets the requirement of anodic bonding, with TiO2, ZrO2 and P2O5 as the nucleation agents and Sb2O3 as the fining agent. The main crystal phase composition and microstructure of the glass-ceramics are analyzed by means of XRD and SEM, respectively. The results indicate that ： the main crystal phase of the glass-ceramics is p-spodumene or β-quartz solid solutions, and the thermal expansion coefficient is （20.207-31.113）×10^-7℃^- 1