集成悬臂梁／探针阵列在PMMA薄膜上微纳摩擦的尺寸和温度效应

Tip size-effect and temperature-effect on PMMA film friction by using an integrated MEMS probe array

在微纳米尺度下,摩擦行为受到针尖尺寸和温度两个重要参数的影响。本研究利用基于Si的微加工制造技术制作了三种不同尺寸并且具有加热功能的悬臂梁探针阵列,用来研究在聚合物PMMA薄膜上摩擦的针尖尺寸效应和温度效应。在PMMA薄膜中存在着两种显著的结构转变过程,包括玻璃态转变(α)和结构驰豫过程(β),这两个过程一直是目前人们广泛研究的热点。本次实验中通过加热针尖从摩擦的变化中检测到PMMA薄膜中的玻璃转变过程和结构驰豫过程,实验结果清楚表明了微纳摩擦中针尖的尺寸和温度的效应。

The tip size and temperature are two important parameters in determining the friction behavior in micro- nano scale. PMMA are important in high -density recording. In this research, three cantilever/tips with different diameters and heating function are prepared using silicon - based microfabrication technology, and used to investigate the size and temperature effect of friction on PMMA polymer film. Glass transition （α） and secondary β process in PMMA remained as unsolved problems in nature can be detected with the heated tip from the friction in this study. Experimental results clearly reveal significant size effect and temperature effect on friction.