振动测量用叉指式硅微加速度计性能研究

Performance analysis of finger-shaped micro-electromechanical silicon accelerometer applied to vibration measurement

硅MEMS加速度仪可以用于地震以及各种工程振动的测量,目前其精度较低,温度灵敏度较高,为了掌握MEMS加速度计的特性,提高其实用性能,本文介绍了一种叉指式硅微机械加速度计(FMSA)表头微结构和系统的工作原理,推导了微结构梁的刚度,利用ANSYS有限元软件分析了FM-SA加速度计的静态特性、动态特性和温度特性,验证了推导的正确性,说明微结构参数是决定FMSA加速度计性能的主要因素,为改进加速度计性能提供了依据,并对其在振动观测领域实际应用提供了理论指导。

Micro-electromechanical silicon accelerometer can be applied to various vibration measurements. For comprehending its performance and improving its precision, principle of a finger-shaped micro-electromechanical silicon this paper describes the microstructure and operation accelerometer. The stiffness of microstructure was calculated theoretically. The static, dynamic and thermal characteristics were analyzed by using ANSYS software and the accuracy of theoretical model was verified. It is shown that the microstructure dimension is the main factor causing the performance of FMSA. The paper provides a theory for improving the performance of accelerometer.