早期热壁卧式LPSIN工艺的优化改进

The Optimization of the Early Hot-wall Horizontal LPCVD Process

文章针对早期热壁卧式LPSIN系统所遇到的颗粒问题,详细阐述了颗粒问题产生的原因,包括DCS气体、工艺压力、反应生成物。针对这些颗粒成因提出了相应有效的优化方法,通过实践每一种优化方法都可以降低LPSIN工艺的颗粒,综合所有优化方法有效地降低了LPSIN工艺的颗粒,极大地延长了设备PM的间隔,提高了LPSIN工艺的质量,大幅提高了设备的流片产能,在不对设备硬件做大的改动的情况下使设备的能力得到了大的改进。

The article focuses on the particle problem of early hot-wall horizontal LPSIN system. It also illustrates the causes of particles, including DCS gas, process pressure, process byproduct. The article gives several effective methods to reduce particles. Every method can reduce the particles. After using these methods in production the particles of LPSIN process are greatly reduced, the PM intervals are prolonged, and also the quality and throughput of LPSIN is improved. Without making big modification the ability of equipment is to be improved.