工艺条件对类金刚石薄膜在不同介质环境下摩擦学性能的影响研究

Effect of Deposition Parameters on the Tribological Performance of Diamond-like Carbon Coatings in Different Conditions

考察了基底负偏压对类金刚石薄膜(DLC)在无水和有水环境下摩擦性能的影响。利用电子回旋共振等离子体化学气相方法沉积制备DLC薄膜,利用激光拉曼(Raman)、原子力显微镜(AFM)和纳米硬度计表征了其结构特征,用UMT型多功能摩擦磨损实验机考察了其摩擦性能,并用光学显微镜分析了磨痕特征。结果表明:随着基底偏压的增加,表面粗糙度减小;在无水条件下,基底偏压较低的DLC薄膜摩擦因数较高,并存在一定的波动性,基底偏压较高时,摩擦因数较低。在有水条件下,基底偏压对摩擦因数影响不大。总体来说,加水后薄膜磨损较为严重。

The effect of minus bias voltage on the tribological property of diamond-like carbon （DLC） film in dry and aqueous conditions was investigated. The films were prepared by chemical vapor deposition （CVD） method, and their structures were analyzed by Raman spectrum, AFM and nanoindentor. The UMT tester was utilized to investigate their tribo- logical property, and optical microscope was used to analyze the worn film surfaces. The results show that with the increase of bias voltage, the surface roughness decreases. The coefficient of friction of DLC films prepared with lower bias voltage is relatively higher in dry condition, and presents some fluctuations with time. The coefficient of friction for the films at high- er bias voltage is lower. The effect of bias voltage on the coefficient of friction is insignificant in aqueous condition. In general, the wear in aqueous condition is much more severe than that in dry condition for the films in this experiment.