类金刚石薄膜表面有机单分子薄膜的制备及其摩擦性能研究

Fabrication and Tribological Study of 1-Octadecene Self-assembled Monolayer on Diamond-like Carbon Film

采用加热法在类金刚石薄膜表面制备1-十八烯自组装有机单分子薄膜,采用接触角测量仪及傅立叶变换红外光谱仪表征薄膜的结构,在原子力显微镜及UMT-2MT型摩擦磨损试验机上从微观和宏观2个角度考察了薄膜的摩擦性能.结果表明,经过十八烯修饰后,DLC薄膜表面疏水性能提高,摩擦系数明显降低,有利于DLC薄膜在微机电系统中的应用.

1-Octadecene self-assembled monolayer was formed on the surface of diamond-like carbon film. The films were characterized by contact angle measurements and attenuated total reflectance Fourier Transformed Infrared （ATR-FTIR） spectra. Tribological studies were performed on atomic force microscope （AFM） and a UMT 2MT type tribometer. After the graft of organic film, hydrophobicity of the surface was greatly enhanced and friction coefficients were largely reduced, which would be beneficial for its application in microelectromechanical systems （MEMS）.