ArF准分子激光器的窄线宽可调谐运转及注入放大

On Tunable, Narrow Spectral Width Operation of a KrF Laser and Injected Amplification

在一台快放电泵浦的ＡｒＦ准分子激光振荡放大系统的振荡级上采用光栅、扩束镜、光阑等腔内元件，用组合输出镜获得了线宽小于０．１ｎｍ，调谐范围～１ｎｍ的激光输出。注入到非稳腔结构的放大级，注入后放大级效率提高了约５０％，获得了平均３０ｍＪ／脉冲的高光束质量的窄线宽可调谐激光，最大单脉冲能量＞５０ｍＪ，并进行了氧气的吸收光谱实验。

We obtain a spectral width less than 0.1 nm and a tunability about 1 nm by adding a grating, a beam expander, shutters and a combining lens in the oscillator of a discharge pumped ArF laser oscillator amplifier system. The output power is injected into the amplifier that produces an average energy of 30 mJ/pulse, and the tunable, narrow spectral, and very low beam divergence laser output. The efficiency is increased about 50 percent after injection. A peak output of more than 50 mJ/pulse is achieved. The O 2 absorption of the ArF laser is also measured.