硅—蓝宝石高温大量程压力传感器设计

Design of high temperature wide range silicon-on-sapphire pressure sensor

介绍了一种硅-蓝宝石高温大量程压力传感器的设计，提出了采用小直径C型膜片的一体化结构，通过合理排布力敏电阻条位置，能够制作出高精度大量程压力传感器。采用该设计研制出了量程分别为60MPa和100MPa压力传感器，其工作温度范围为-50-350℃；满量程输出≥100mV；精度优于0．1％；迟滞与重复性均优于0．05％FS。

The design of a kind of silicon-on-sapphire pressure sensor with high temperature and wide operation range is introduced. A small diameter compacted structure with C-shaped diaphragm is brought forward. Due to the properly arrangement of force sensitive resistances, high precision and wide operation range pressure sensor can be fabricated. By the design method,the pressure sensors with 60 MPa and 100 MPa operation range are studied and fabricated, hsoperation temperature is -50 -350℃;full scale output ≥100 mV; precision is better than 0.1% ; hysteresis and repeatability are better than 0.05 % FS.