摘要
将有机金属先驱体[Sn(N(CH3)2)2]2在适当的条件下热解,制备了尺寸分布集中的SnO2纳米颗粒。然后,在气体传感器的多晶硅层上原位沉积纳米颗粒悬浮液得到纳米颗粒多孔薄膜传感层,并探索了SnO2纳米颗粒传感器原位掺杂Mg,K,Ba元素,检测气体传感器在不同CO2体积分数下的敏感性。结果表明:此方法制得的传感器对CO2气体敏感性不佳,尚需进一步研究掺杂元素和掺杂工艺。
The organometallic precursor [ Sn（ N （CH3）2）2]2 is decomposed in a controlled condition, resulting in monodisperse SnO2 nanoparticles. The SnO2 nanoparticle colloid is deposited in-situ on the polycrystal silicon platform and then the porous structure sensing-layer is formed by sintering. In-situ doping of Mg, K, Ba element in SnO2 nanoparticle gas sensor is also carried out. The gas sensors are tested to detect the sensibility to different volume fraction of CO2 gas. The results show that the sensors made in this way don＇ t display good sensilility for CO2. It is needed to research more doping element and doping technics.
出处
《传感器与微系统》
CSCD
北大核心
2007年第12期114-116,共3页
Transducer and Microsystem Technologies
基金
河北省留学回国人员择优资助项目
