MEMS开关技术的研究与进展

Study and Development of MEMS Switch Technique

开关是信号变换的关键元件。随着MEMS技术的发展,使实现低功耗、隔离度好、工作频带宽的MEMS开关成为现实。在MEMS技术的基础上,分析了MEMS开关技术及其在电路系统中的应用,并着重阐述了射频MEMS的结构及其相关技术特点。

Switch is the key component of signal transition. The MEMS switch of low loss, high isolation and overlarge bandwidth comes true with the development of MEMS technology. The MEMS switch technology and its application is analyzed based on the MEMS technique in the paper. The structure and technique character of RF - MEMS switch are mainly expounded.