Traceable long range scanning tunneling microscopy

Dimensionally correct and directly traceable measurement is not feasible with conventional scanning tunneling microscopy (STMs) due to severe hysteresis and non-linearity of the commonly applied piezo tube scanners and the very short range. By integrating a custom made probing system based on tunneling current measurement into a commercially available and laser-interferometrically position controlled positioning system, an STM with a principal measuring

Dimensionally correct and directly traceable measurement is not feasible with conventional scanning tunneling microscopy （STMs） due to severe hysteresis and non-linearity of the commonly applied piezo tube scanners and the very short range. By integrating a custom made probing system based on tunneling current measurement into a commercially available and laser-interferometrically position controlled positioning system, an STM with a principal measuring range of 25 mm × 25 mm× 5 mm and traceable position measurement has been set-up and tested.