微制造隔振平台振动的模糊广义预测控制

FUZZY GENERALIZED PREDICTIVE CONTROL OF MICROVIBRATION ISOLATION SYSTEM FOR A MICRO-MANUFACTURING PLATFORM

采用主动隔振与被动隔振相结合的技术,建立以空气弹簧为被动隔振元件、超磁致伸缩致动器为主动隔振元件的微制造平台6自由度隔振系统及其结构模型。提出一种改进的自适应广义预测控制算法,并与模糊控制结合起来,应用于微制造平台的振动控制中,实现广义预测控制与模糊控制的优势互补。计算机仿真与试验结果表明,所设计的微制造平台模糊广义预测控制系统具有良好的鲁棒稳定性、抗干扰能力和时域性能,可在非常宽的频率范围内将由干扰所引起的微制造平台的振动在被动隔振的基础上减少80%左右,效果显著。

A 6-degree-of-freedom microvibration isolation system for a micro-manufacturing platform is developed. This system uses four air springs as passive vibration isolation elements and eight giant magnetostrictive actuators as active vibration isolation elements. An improved adaptive generalized predictive control approach is put forward. Considering the merit and defect of the generalized predictive control and fuzzy control, the hybrid control of the improved adaptive generalized predictive control approach and fuzzy control is used in the active vibration control of the micro-manufacturing platform. The simulation and experiment results show that the developed fuzzy generalized predictive control system of the micromanufacturing platform has good robust stable, anti-jamming ability and time domain performance, and has good isolation performance against the floor disturbance over wide frequency area.