用于干涉显微镜的移相器件驱动电路设计

Design of Actuation Electric Circuit for Interference Microscope Phase Inverter

介绍了压电晶体在干涉条纹扫描技术中的应用,对压电晶体的线性工作区域以及滞后和蠕变的问题进行了讨论,并对压电晶体的线性度等性能指标进行测试,确定出一个实验比较适合的工作范围.重点阐述了压电晶体驱动电路以及程序的设计,并讨论了调试和测试结果.

This article introduces the piezoelectric crystal scans application in technology of interference streak; Then it discusses the problem of piezoelectric crystal linearity working space, as well as lagging and creep, and tests the piezoelectric crystal function index, for instance the Linearity degree, then ascertains efficient range of experiment comparatively suitable ; Finally it expounds the design of the piezoelectric crystal drives circuit and procedure, and discusses the result debugging and testing.