DMD系统的环形光栅的设计和制作

BESIGN AND FABRICATION OF CIRCULAR GRATING BASED ON DIGITAL MICRO-MIRROR DEVICE

本文讨论了基于数字微镜系统(DMD)的环形光栅的设计和制作方法。利用DMD系统,我们可以制作出低成本、半径可调的环形光栅,为使其集成到微光机电系统提供了一种可能。通过实验,我们获得了最大外半径为42.7μm的环形光栅。

This paper presents National Laboratory design and fabricate circular gratings（CGS）based on digital micromirror device（ DMD）system. By use of the DMD system,we are capable of making low - cost and useful circular gratings easily. Their radius can be controlled and be suited for many optical systems. Experiment results have been obtained with 42.7μmCG.