摘要
采用电磁场理论建立了FeNi磁芯螺线管微电感的物理模型,并对交流载荷下的微电感进行了模拟.通过与磁芯厚度为10、20、30和40μm的微电感的实验结果对比,表明该物理模型能够较准确地模拟磁芯螺线管微电感的主要损耗,进而可计算微电感的电感量和品质因子.模拟结果与实验符合较好.
This paper presented a physical model of a solenoid micro-inductor with magnetic core on the basis of electromagnetic theory. In this model, the properties of micro-inductor at MHz are simulated, and compared with the experimental results for a solenoid micro-inductor with a core thickness in 10, 20, 30 and 40μm, respectively. The results show that the model can simulate the major power loss of microinductor, which can be used to calculate the inductance and quality factor of micro-inductor. The calculated results agree with the experimental data well.
出处
《上海交通大学学报》
EI
CAS
CSCD
北大核心
2007年第11期1867-1870,共4页
Journal of Shanghai Jiaotong University
基金
国家高技术研究发展计划(863)项目(2006AA03Z301)
上海应用材料研究与发展基金(0515)
非硅精密微机械制造技术研究基金(D2320060098)
上海市纳米专项基金(0652nm004)资助项目
关键词
螺线管
微电感
磁芯
物理模型
solenoid
micro-inductor
magnetic core
physical model
