音圈电动机驱动的快速精密定位系统设计与控制方法研究

Study on Design and Control Method of Rapid Precision Locating System Driven by Voice Coil Motor

针对传统驱动方式在快速定位方面的不足,研制了一种基于音圈电动机驱动的快速精密定位系统,并对定位系统的关键部件———气浮滑块进行了承载力和刚度分析;设计了仿球形联轴器,能够满足音圈电动机和气浮滑块的高精度联接要求;研究了快速定位系统的控制方法,通过PID预测补偿、模糊预测补偿来修正定位误差;在此基础上,对快速精密定位系统的综合性能进行了测试。实验结果表明所设计的定位系统能够满足高精度和高频响的运动要求。

With a view to some disadvantages of traditional driving way in rapid locating field, a rapid precision locating system is developed which is driven by voice coil motor （ VCM ） in this paper. The load and stiffness of aerostatic slide, which is a key part in locating system, are analyzed. In order to achieve stable connection with high precision between voice coil motor and aerostatic slide, a kind of spherical shaft coupling is designed. The control method of rapid locating system is studied, and moving error is corrected by using PID predictive compensation and fuzzy predictive compensation. Moreover, the general performances of rapid locating system are measured, and the experimental results show that this locating system can satisfy the requirements of high precision and high response.