测量界面软铬层力学性质的纳米压入法

Mechanical Property Measurement Of Interfacial Soft Chromium Layer Based On Nano-Indentation Method

为了测量双层铬的界面软铬层力学性质,提出了化学腐蚀基体法,通过溶解掉基体制备没有基体支撑的自由铬层,将在横截面内线状显示的界面转化为界面表面(铬层与基体相连接的面),避免了横截面不能显示界面表面的缺点。对界面表面进行纳米压入实验和借助于表征薄膜力学性质的表面压入能量法,测得了描述界面软铬层力学性质的弹性模量和压入弹、塑性功等参数。

In order to measure mechanical properties of interfacial soft double chromium layer, the method of chemically etching substrate is presented. A free chromium coating without supporting substrate is prepared through dissolving substrate. The interface displayed in line mode in cross- section is changed into interfacial surface, which is an interface between Cr-coating and substrate. Thus, the disadvantage that interfacial surface is not displayed in cross-section is avoided. The mechanical properties, such as elastic modulus, elastic and plastic work of indentation are measured by nano-indentation on interfacial surface and the energy method of nano-indentation on token film surface.