梯度变化非晶碳涂层的摩擦学行为

Friction and Wear Behavior of Gradient Amorphous Carbon Coat

采用多源磁控溅射物理气相沉积法在单晶硅片、20Cr和Cr12W表面制备了梯度变化非晶碳涂层，测试了非晶碳涂层的纳米硬度和弹性模量及摩擦磨损行为。结果表明：涂层具有较高的硬度和弹性模量，分别达到15．3GPa和184GPa；涂层具有较好的摩擦性能，在干摩擦条件下摩擦因数基本保持在0．1～0．2，磨损率达到10^-9mm^3／（N·m）数量级。

Amorphous carbon coats of gradient structure are deposited on single crystal silicon, 20Cr and Cr12W by a multiple source magnetron sputtering PVD deposition system. The nano-hardness, reduced modulus and the friction and wear properties of the coats are tested. The results show that the coats have comparatively high hardness and elastic modulus of 15.3 GPa and 184 GPa respectively, the coats have better friction and wear behavior, and the friction coefficient stays at 0. 1 - 0.2 in dry air and the wear rate is approximately at the level of 10^-9 mm^3/（N · m）.