Ipsu薄膜体声波器件及其在通信系统中的应用

Thin film bulk acoustic wave devices and their applications in telecommunication systems

薄膜体声波谐振器(FBAR)采用一种先进的谐振技术,它是通过压电薄膜的逆压电效应将电能量转换成声波而形成谐振,这一谐振技术可以用来制作薄膜频率整形器件等先进元器件.本文系统介绍了FBAR的结构、工作原理及其在现代通信系统中的应用.

A Film Bulk Acoustic Resonators （FBARs） is a breakthrough resonator technology based on a reverse piezoelectric effect that occurs when an electric signal applies on a piezoelectric thin film, transforms to an acoustic wave, and accordingly forms resonation. This technology can be employed to create advanced frequency shaping components and devices including filters, duplexers, and resonators for oscillators. The structures, the working mechanisms of FBARs are introduced in this paper, and their applications into modern telecommunication systems are also reviewed.