基于PLC的真空溅射镀膜机控制系统设计

Design of Control System on Vacuum Sputtering Plating Machine with Programmable Logic Controller

真空溅射镀膜技术及设备在当今和未来都拥有十分广阔的应用领域和发展前景。由于采用继电器-接触器的镀膜机存在一些缺陷和不足,设计了基于PLC的真空溅射镀膜机。几年的实践证明:改进后的镀膜机工作效率有很大提高,设备维修率也大大降低,它为同类系统的设计提供了参考。

The technology and equipment of the vacuum sputtering coating have the extremely broad application and the development in the future. Because the plating machine with the relay - contact control system has some defects, the plating machine with programmable logic controller is designed, several years practice proves. The efficiency of the plating machine that is innovated improves greatly, and its maintenance probability decreases greatly. It also provides reference for similar system.