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Influence of scanning velocity on femtosecond laser direct writing lines on FOTURAN glass

Influence of scanning velocity on femtosecond laser direct writing lines on FOTURAN glass
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摘要 Lines are induced on the surface of a photosensitive (FOTURAN) glass by focused femtosecond laser transverse writing with scanning velocity in a wide range of 40-1800 μm/s. The formed lines are analyzed using scanning electron microscope (SEM) and optical microscope (OM). It is observed that three distinct morphologies of lines are produced depending on the scanning velocity. Lines written in low velocity level (40 - 100 μm/s) and high velocity level (1000 - 1800 μm/s) are uniform and regular, while those written in moderate velocity level (150 - 600 μm/s) are rough. The influence of scanning velocity is explained based on different pulses overlapping or cumulative dose of laser exposure in irradiated area. Fabrication of shallow groove on the surface is also demonstrated. Lines are induced on the surface of a photosensitive (FOTURAN) glass by focused femtosecond laser transverse writing with scanning velocity in a wide range of 40-1800 μm/s. The formed lines are analyzed using scanning electron microscope (SEM) and optical microscope (OM). It is observed that three distinct morphologies of lines are produced depending on the scanning velocity. Lines written in low velocity level (40 - 100 μm/s) and high velocity level (1000 - 1800 μm/s) are uniform and regular, while those written in moderate velocity level (150 - 600 μm/s) are rough. The influence of scanning velocity is explained based on different pulses overlapping or cumulative dose of laser exposure in irradiated area. Fabrication of shallow groove on the surface is also demonstrated.
出处 《Chinese Optics Letters》 SCIE EI CAS CSCD 2008年第1期51-53,共3页 中国光学快报(英文版)
基金 This work was supported by the Key Grant Project of the Ministry of Education,P.R.China(No.10410) the Science and Technology Development Project of Tianjin City (No.043103911) the National Natural Science Fundation of China(No.60608004)
关键词 MORPHOLOGY Optical microscopy Photosensitive glass Scanning electron microscopy Morphology Optical microscopy Photosensitive glass Scanning electron microscopy
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参考文献14

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