CoFe／TiZr多层膜材料界面结构与性能的极化中子反射研究

Investigation of interfacial structure and property of CoFe/TiZr multilayers by polarized neutron reflectometry

利用极化中子反射技术较系统地研究了CoFe/TiZr复合多层膜材料界面结构,结果表明.1)从多层膜超镜传输特性角度考虑,等厚对层不如非等厚对层膜结构好.2)等厚对层的最佳退火温度约250℃,非等厚对层退火温度低于250℃影响不明显,等厚和非等厚对层经350℃退火后膜层变化严重.3)从布拉格峰位变化看,随着退火温度的升高,等厚对层膜的厚度先变小后变大;非等厚对层与之相反.

Polarized neutron reflectivity has been measured for the CoFe/TiZr alloy multilayers. The results show that： （a） The reflectivity behavior of the sample with un-equal-thickness bilayer （type B） is better than that of the sample with equal-thlckness bilayer （type A）. The former performs better in producing neutron guide. （b） The best annealing temperature is about 250℃ for the sample of type A, however, the structures of both type A and type B samples change apparently after 350℃ annealing. （c） Different from the type B sample, the first Bragg peak position for the type A sample moves along Q axis, indicating that the period of the multilayer varies in a way of increase-decrease-increase with the increase of annealing temperature.