摘要
为了在不锈钢表面形成良好膜基结合强度且成分结构可控的TiO2薄膜，首先利用双层辉光离子渗镀技术在不锈钢表面形成渗Ti层，渗金属温度为950℃，然后将渗钛试样置于真空管式炉在200～750℃温度范围内进行热氧化从而形成不同结构的TiO2薄膜。重点就氧化温度对所形成TiO2薄膜的组织成分和相结构的影响进行了研究。结果表明：不同温度下不锈钢表面均形成了致密、均匀的钛氧化物薄膜，且Ti、O元素在不锈钢基底上形成了扩散层，随着温度升高，扩散层厚度增大。xRD分析结果表明：在温度低于300℃时，生成相为TiO和锐钛矿TiO2的混晶；在300～600℃的温度范围，为单一锐钛矿TiO2结构；在650℃以上时，晶型转变为金红石结构。
TiO2 thin films with good adhesive strength have been formed on stainless steel base by double glow discharge technique and thermal oxidation method. Ti layers are formed by double glow discharge technique at 950 ℃, then the samples are treated at 200-750 ℃ by thermal oxidation. The influence of thermal oxidation temperature on the component and structure of TiO2 films has been studied. The result shows that the uniform films are formed on stainless steel base, Ti,O diffusing layers can be formed on the surface of the stainless steel base and their thickness increases with the higher thermal oxidation temperature. The thermal oxidation temperature also has great influence on the phase of the thin films. XRD results show that the phase is TiO and anatase TiO2 under 300 ℃ ; at 400-600 ℃,the phase is anatase TiO2 ; over 650℃ ,the phase is rutile TiO2.
出处
《太原理工大学学报》
CAS
北大核心
2008年第1期17-19,共3页
Journal of Taiyuan University of Technology
基金
山西省高等学校青年学术带头人资助项目(20021002)
太原市科技计划项目明星专项资助项目(07024027)
关键词
TIO2
不锈钢
离子渗镀
热氧化
TiO2
stainless steel
plasma surface alloying technique
thermal oxidation
