摘要
研究了基于采样定理的白光干涉测量算法——Square-envelop function Estimation by Sampling Theory(SEST)算法,该算法采样间隔是传统算法的数倍,最大可达1.425"m,大大提高了测量速度。在该算法基础上,提出应用循环缓冲器来定位相干区间,减少了存储的采样值及计算量,提高了数据处理速度。仿真结果表明,该算法是快速、有效的。
An white-light interferometric algorithm,Square-envelop function Estimation by Sampling Theory （SEST） algorithm, based on sampling theory is introduced.The algorithm extends the sampling interval to 1.425 μm,which is several times wider than those used in conventional algorithm.On the basis of the algorithm,a circular buffer is proposed to locate the interference region in order to reduce the sampling data and the computational cost then increase the data processing speed.Simulation results show that the algorithm is fast and effective.
出处
《计算机工程与应用》
CSCD
北大核心
2008年第1期79-81,共3页
Computer Engineering and Applications
基金
国家重点基础研究发展规划(973)(the National Grand Fundamental Research973Program of China under Grant No.2003CB716207)
国家自然科学基金(the National Natural Science Foundation of China under Grant No.50405033)
国家高技术研究发展计划(863)(the Na-tional High-Tech Research and Development Plan of China under Grant No.20060104Z3055)。
关键词
光学测量
SEST算法
白光干涉
表面形貌
optical measurement
SEST algorithm
white-light interference
surface profile
