钝化硅太阳电池减反射膜的研究

A Study on the Anti Reflection Coating of Passivated Silicon Solar Cells

从多层膜系在某一波长的反射率的计算原理和计算方法入手，采用等效分界面和权重反射率Ｒｗ的概念，给出了多层膜系优化的普适方法．具体计算了钝化太阳电池（含ＳｉＯ２钝化层）的单层减反射膜和双层减反射膜的优化设计，给出了常用减反射材料的最佳膜厚值，并得出结论：双层膜的减反射效果优于单层膜，平面双层减反射膜的权重反射率Ｒｗ小于６％，加微槽结构后降至２％以下（ＳｉＯ２钝化层厚度为２５ｎｍ）．

By starting with the computing principle and method for the reflectivity of a multilayer coating system of a certain wavelength and with the introduction of the concepts of equivalent interface and weighted reflectivity R w, a general method of optimizing the thickness and refractivity of the system under different spectra is presented. An optimization design for the single anti reflection coating and double anti reflection coating of the cell with a layer of passivated SiO 2 have been carried out, and the best thickness of normal anti reflection material is listed. It is concluded that the effect of anti reflection of the double coating is better than that of the single coating and the micro grooved construction is better than the plane surface construction. The weighted reflectivity R w of the plane double anti coating is about 6% while that of the micro grooved construction is lower than 2%, when the thickness of the passivated layer of SiO 2 is assumed to be 25nm. Low refractivity ( n =1.46) of the passivated SiO 2 layer is disadvantageous to the reduction of weighted reflectivity and to the improvement of short circuit current density J sc .