超精密点对点运动三阶轨迹规划精度控制

Precision Control of Third-order Profile Planning for High Accuracy Point-to-point Motion System

研究一种优化的超精密点对点运动三阶轨迹规划算法及其精度控制策略。在简要分析三阶轨迹轮廓可能情形的基础上,建立三个约束基准用来预判别以上情形:速度—加速度基准、位移—加速度基准和位移—速度基准,依据该基准与系统约束,提出一种考虑轨迹全过程的预处理方法,并给出时间优化的轨迹规划算法。考虑算法离散实现时的精度损失,提出一种轨迹规划内部整数积分策略,避免因浮点积分操作所造成的数据漂移而引起的精度失败。此外,提出一种基于位置修正因子的补偿方法,克服切换时间圆整所引起的终点位置偏差。实例证明提出算法的有效性和可靠性。该算法已成功应用于半导体加工装备研发中。

A third-order profile planning method and precision control strategies for point-to-point motion are studied. Several criterions are presented relying on all possible instances for third-order profile planning. Based on these criteria and dynamic constraints, fast and accurate algorithm of profile planning with time-optimality by preprocessing the entire profile as a whole is described. Accuracy losses in discrete time implementation are considered. As a result, an internal integer data integration strategy and a compensation approach based on correcting factor are investigated. Finally, experiment results demonstrate the effectiveness and reliability of the proposed methods. The presented method is successfully applied in semiconductor manufacturing equipments.