改变正压力的惯性式压电旋转机构

Inertial piezoelectric rotary actuator based on changing positive pressure

提出了通过机械方式控制压电移动机构和支撑面之间摩擦力的有序变化来形成有规律的新型惯性式压电旋转机构的研究方案。设计了旋转机构的结构模型,分析了机构的运动原理,建立了机构的动力学模型。应用现代控制理论,利用Matlab对机构进行了运动学仿真,得到了机构位移和速度仿真曲线。设计、制作了旋转机构样机,并进行了相关的性能测试。试验结果表明,研制的旋转机构能实现大行程(360°)、高分辨率(15μrad)、高转速(0.26 rad/s)且运动性能稳定。该旋转机构在精密运动、微操作、光学工程、精密定位等精密工程中有广阔的应用前景。

By controlling the ordered changes of the PZT moving mechanism and positive pressure between supporting faces in mechanical way, a new kind of inertial piezoelectric rotary actuator was proposed. The structural model of a rotary actuator was designed, the moving principle and the performance of the actuator were analyzed and a dynamic formulation of inertial actuator was established using Matlab software. Based on modern control theory, the kinetic simulation of the actuator was carried out to get the displacement and speed simulation curves of the actuator, and the prototype of new inertial piezoelectric rotary actuator was designed and manufactured. The experimental results show that the developed actuator is characterized by large travel （360°）, good resolution（15 μrad）, high speed （0.26 rad/s） ,and work stability. It can be applied in the field of micromanipulation and precision en- gineering, such as precision driving and positioning, optics engineering, etc.