1[1]Kuyama M.Preparation and basic properties of ferroelectric thin films and their device application.Ferroelectrics.1985,63:243～252
2[2]Wenger A B,Brueck S R J,Wu A Y.Integrated FLZT thin film wave-guide modulators .Ferroelectrics.1991,116:195～204
3[3]Spierings G A C M,Ulenaers M J E,Kampschoer G L M,et al.Preparation and ferroelectric properties of PbZr0.53Ti0.47O3 thin films by spin coating metal-organic decomposition.J Appl Phys,1991,70(4):2290～2298
4[4]Parker V R, Purandare S C,Pai S P,et al.C-axis oriented ferroelectric thin film of PbTiO3 on Si by pulsed laser ablation.Appl Phys Lett,1996,68(11):1582～1584
5[5]Basit N A,Kim H K.Crystallization of Pb(Zr,Ti)O3 films prepared by radio frequency magnerton sputtering with a stoichiometric oxide target.J Vac Sci Technol A,1995,13(4):2214～2220
6[8]Huffman M.Liquid source misted chemical deposition(LSMCD)-a critical review.Integrated Ferroelectrics,1995,10:35～39
