Sol-Gel 法制备Li_2B_4O_7 薄膜

Applications of Piezoelectric Thin Films in Vibration Control and Finite Element Analysis

用Ｓｏｌ－Ｇｅｌ法在以单晶Ｓｉ（１１１）为基底材料上制备出了Ｌｉ２Ｂ４Ｏ７薄膜，对其工艺过程进行了研究，讨论了主要控制参数的作用。

This paper introduces the principle of piezoelectricity and its applications in active vibration suppression of flexible structures. After a review of previous main work of finite element analysis in research of active vibration controlof flexible structures, some problems need to be resolved in future are proposed.