摘要
平面微型弹簧是微机电系统(micro-electro-mechanical system,MEMS)中一种常用的弹性元件。在平面微型弹簧的设计与应用中,弹簧的刚度系数是其一个非常重要的参数。弹簧的刚度系数是由弹簧的形状、结构、尺寸和弹簧的材料确定的。利用材料力学的能量法,研究平面微型弹簧基本结构、形状和其刚度系数的关系,为设计平面微型弹簧提供理论指导。
The planar micro-spring is commonly used in the micro-electro-mechanical systems. The rigidity of micro-spring is the most important parameter in the design and application. However the rigidity is relevant with the structure of micro-spring. The funda- mental structures of several micro-springs are researched by energy method, and the relation between the fundamental form and the rigidity is derived. Thereby it provides some advice for the design of micro-spring.
出处
《机械强度》
EI
CAS
CSCD
北大核心
2008年第1期162-165,共4页
Journal of Mechanical Strength
关键词
微机电系统
平面微型弹簧
结构形状
刚度系数
Micro-electro-mechanical system
Planar micro-spring
Structure and form
rigidity coefficient
