摘要
为探索电子束物理气相沉积(EB-PVD)制备YSZ涂层的显微组织结构特征,采用大功率EB-PVD设备制备了20μm厚的YSZ涂层.分别利用X射线荧光光谱(XRF)和X射线衍射(XRD)技术分析了涂层的化学成分和物相组成,并进一步采用X射线面探扫描技术对涂层的织构进行了表征.分析结果表明,涂层材料具有典型的立方萤石型结构,且表现出择优取向特征,空气气氛中1273 K退火前后XRD峰位的偏移以及退火后O元素沿断面的浓度分布均表明制备过程中在涂层的晶格内形成了额外的氧空位.
In order to investigate the microstructure characteristics of YSZ coatings prepared by electron beam physical vapor deposition （ EB-PVD）, the YSZ coating with a thickness of 20 μm was prepared by EB-PVD equipment with a high power. The chemical and phase compositions of coatings were analyzed by X-ray fluorescence spectrometry （XRF） and X-ray diffraction （XRD） respectively. Furthermore, the texture of this coating was characterized by X-ray diffraction with an area detector. Analysis results demonstrated that the diffraction patterns showed the lines of cubic fluorite-type structure and an intense preferred orientation. Both the excursion of XRD peak positions before and after annealing at 1273 K in air atmosphere and the oxygen concentration distribution along the cross-section after annealing at 1273 K by EPMA method, showed that the extra oxygen vacancies were formed during the process of EB -PVD.
出处
《材料科学与工艺》
EI
CAS
CSCD
北大核心
2007年第6期770-773,共4页
Materials Science and Technology
