Pb合金EBSD花样标定率的影响因素

Influence factor of Pb alloy EBSD pattern indexing rate

采用FEI Sirion 200型场发射扫描电镜上配置的HKL公司Channel 5 EBSD系统,研究了Pb合金EBSD花样标定率的影响因素。结果表明,Pb合金样品处理、扫描电镜参数调整以及Channel 5软件参数设置都会直接影响标定率的高低。严格程序的样品处理和恰当的电镜及软件参数设置,通常会获得很高的EBSD花样标定率,再结晶状态和形变状态的Pb合金EBSD花样标定率可分别达到99%和97%。

The influence factor of Pb alloy EBSD pattern indexing rate were studied by HKL technology the Channel 5 EBSD systems on FEI Sirion 200 heated field emission scanning electron microscope （SEM）. The results indicated that, the Pb alloy sample preparation, the scanning electron microscope parameter adjustment as well as the Channel 5 software parameter establishment can affect the indexing rate directly. The strict procedure of sample preparation and the appropriate electron microscope and the software parameter establishment, usually can obtain the very high EBSD pattern indexing rate. It may respectively achieve 99% and 97% in recrystallized condition and deformation condition.