摘要
讨论了在ZnS窗口和整流罩上实现DLC膜的方法，给出了膜系和实验结果．从测试结果可以看出。ZnS基片、Si膜和DLC膜在7-10μm的平均透过率比以往的双面减反射膜有了明显的提高，不仅满足了技术指标的要求，而且也有利于DLC膜应用领域的进一步拓展．
The method of depositing Diamond-like-Carbon on ZnS-substrate was discussed, and the corresponding experimental results were given. Based on analysis of coating samples, we demonstrated that average transmittances of ZnS-sub, Si-coating, DLC for wavelengths between 7--10μm had been improved significantly compared to the old double-coated anti-reflecting film. This not enhance the development of applications of DLC. only satisfied technical requirements, but also could
出处
《光电技术应用》
2007年第6期41-44,共4页
Electro-Optic Technology Application
基金
光电信息技术科学教育部重点实验室资助项目(2005-19)
关键词
硫化锌
类金刚石膜
化学气相沉积
热压
射频等离子放电法
ZnS
diamond-like-carbon
chemistry vaporization deposition
hot press
radio frequency chemistry vaporization deposition
