聚醚/二苯甲酮侧基聚硅氧烷的膜形貌及亲疏水行为

Film Morphology,Hydrophilic-Hydrophobic Behavior of Polysiloxane Bearing Ployether and Benzophenone Derivative Side Groups

用原子力显微镜AFM等仪器研究了单晶硅表面聚醚(PE)/二苯甲酮衍生物(UV)侧基聚硅氧烷PE-PUVSi的膜形貌及亲、疏水特性,探讨了空气湿度对PE-PUVSi膜形貌及表面性能的影响。结果表明,在单晶硅表面PE-PUVSi形成的硅膜呈非均一、微观相分离结构,其中UV侧基以直立纤细尖峰态分布在聚硅氧烷膜表面,而亲水性PE侧基则卷曲堆积成峰包。将PE-PUVSi硅膜在相对湿度(RH)为97%的空气中放置2.5 h,PE-PUVSi膜表面因吸附水而亲水性增加,其原有的纤细尖峰消失,而且膜表面平均粗糙度降低。

Film morphology and hydrophilie or hydrophobic behavior of polysiloxane （PE-PUVSi） bearing polyether （PE） and benzophenone derivative （UV） side groups were studied by atomic force microscope （AFM） and other instruments. Effect of air humidity on the mo property of PE-PUVSi film was also investigated in the article. The experiment results show that PE- PUVSi forms an un-homogeneous and micro-phase separation structural film on silicon wafer surface. The slim pinnacles in AFM topography of PE-PUVSi were supposed to result from the UV groups while the big mountains maybe arisen from the curled gigantic PE groups linked to the polysiloxane skeleton. In addition, air humidity can affect the surface property and morphology of PE-PUVSi film. When exposed to the air of relative humidity of 97% for 2.5h, PE-PUVSi film will absorb water molecules from the moisture, which causes the hydrophilic property of the film to increase, also leads to the slim pinnacles to disappear from its topography. As a result, the average roughness of the PEPUVSi film is reduced.