摘要
概述了近几年来快速发展的新兴材料加工工艺技术——电子束物理气相沉积(EB-PVD)技术的研究及应用现状,着重阐述了电子束物理气相沉积(EB-PVD)过程的主要工艺参数和制备高温合金板材显微组织的形成机理。
The recent research and application evolvement of electron beam physical vapor deposition( EB- PVD)technology are reviewed in this paper. Some key points with emphasis on the main technological parameters(such as evaporation temperature,gas pressure,rate of evaporation and coacervation, heating-up temperature and so on) in progress and the formative mechanism of microstructure of supper-alloy sheet prepared by EB-PVD are expounded.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2007年第F11期246-248,255,共4页
Materials Reports
基金
总装备部预研基金项目(No.51418040304HT0114)
关键词
电子束物理气相沉积(EB-PVD)
应用
工艺参数
形成机理
electron beam-physical vapor deposition (EB-PVD), application, technological parameters, formative mechanism