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Ca-B-Si系LTCC基板材料的制备及其介电性能研究 被引量:3

Research on Preparation and Dielectric Properties of CaO-B_2O_3-SiO_2 LTCC Substrate Material
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摘要 利用高温熔融法制备的硬玻璃的强析晶能力和软玻璃的低温烧结性,将两种玻璃混合掺杂,结合对工艺参数的控制,研究了不同玻璃配方组成、不同混掺比例以及不同烧结温度对其介电性能和烧结性能的影响,最终在HG31P:SG1摩尔比为8:2,烧结温度为850℃下制得烧结完全致密,CaSiO_3为主晶相,介电常数ε=5.6~6.4,损耗角正切tgδ<15×10^(-4),绝缘电阻率R_j>10^(12)ΩQ·cm,烧结密度ρ>2.48g/cm^3的低温共烧陶瓷。 CaO-B2O3-SiO2 LTCC system is prepared by mixing two kinds of CaO-B2 O3-SiO2 glasses, one is hard galss which has strong crystallization ability, the other is soft glass which has low liquidus temperature. The effect of processing parameters, compositions proportion of two kinds of glasses and sintering temperature on the dielectric and sintering properties is studied. Finally LTCC of HG31P : SGI=8 : 2(mol proportion) with excellent dielectric properties of ε≈5.6-6.4, tgδ〈15×10^-4 ,Ri〉10^12Ω·cm,and p〉2.48g/cma is obtained.
出处 《材料导报》 EI CAS CSCD 北大核心 2007年第F11期350-352,共3页 Materials Reports
关键词 Ca-PrSi系玻璃 LTCC 硬玻璃 软玻璃 CaSiO3 Ca-B-Si, LTCC, hard glass, soft glass, CaSiO3
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