摘要
Parylene是一种性能优异的高分子聚合物,其制备一般采用Gorham法,即在真空条件下,将对二甲苯环二体在373K以上加热升华为气态,再经963K左右高温裂解成对二甲苯单体粒子单分子,单体进入沉积室,在基体表面沉积、聚合,形成线性的聚对二甲苯薄膜。原料的升华与裂解速率、沉积压力、基体温度等都是影响Parylene膜沉积速率、膜结构与性能的重要因素。
Parylene is a high quality polymer. It is prepared using gorham method, that is, in vacuum di-para- xylylene vaporizes at more than 373K and is pyrolyzed at about 963k to form para-xylylene, which is conducted into a chamber and deposited and polymerized on the surface of substrate to form linear macromolecules. There are some im- portant factors such as sublimation and pyrolytic rate, deposition pressure and substrate temperature, which affect depo- sition rate,structure and property of parylene films.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2007年第F11期367-370,共4页
Materials Reports
