摘要
对400,500,600,700,800,900,1000℃温度下煅烧制得的氧化铟锡（ITO）粉体进行X射线衍射分析,利用Vegard定律分析得到的衍射数据计算出靶材的晶格常数和氧化锡在ITO靶材中的固溶度,得出ITO靶材中氧化锡的固溶度大小主要与温度有关,氧化锡相在靶材中的固溶度随着温度的升高而增大的结论。靶材热压烧结降温时,保持120-150℃·h^-1的降温速率可以得到纯度为99.995%,相对密度为99.274%的氧化铟单相ITO靶材。
120～150 ℃·h-1 cooling rate is helpful obtain indium oxide in single phase with relative density 99.274% and purity 99.995%.The ITO powders obtained at 400,500,600,700,800,900,1000 ℃ were obtained by X-ray diffraction. Based on crystal lattice constant and solubility of tin oxide in ITO target were calculated by Vegard principle.It was found that the solubility of tin oxide in ITO target was related to temperature,and the solubility of tin oxide in ITO target was increased with increasing temperature.In the process of sintering ITO target,reasonable cooling rate is helpful to obtain indium oxide in single phase.
出处
《稀有金属》
EI
CAS
CSCD
北大核心
2007年第6期794-797,共4页
Chinese Journal of Rare Metals
基金
国家高技术研究863基金资助项目(2004AA303542)
关键词
ITO靶材
降温速率
固溶度
相组成
ITO target
cooling rate
solubility
crystalline phase
