高精度自动化椭圆偏振光谱仪

High Precision Automatic Ellipsometer

报导了４８６／８０计算机控制的自动化的转动检偏计式的光度法椭圆偏振光谱仪的设计和制造．仪器主要由光学系统、机械转动控制系统和数据采集系统组成．其频谱范围２００～９００ｎｍ，入射角可在５～８５°连续改变，灵敏度达０．１μＷ光强，有很高的精密度，折射率ｎ达０．００２量级，消光系数ｋ达０．００３量级，准确度ｎ达０．００１量级，ｋ达０．００２量级．实验检验了仪器的精密度和准确度．

A home made automatic photometric ellipsometer of rotating analyzer type is reported. The ellipsometer consists of an optical system,a mechanical rotation system and a data acquisition system controlled fully by a 486/80 microcomputer. The wavelength range is 200￣900 nm and the ellipsometer can continue to change the incident angle from 5 to 85°. The light sensitivity is 0 1 μW and the precision is of the order of 0 001 for refractive index n and 0 002 for the extinction coefficient k .