石英谐振式力传感器的温度特性及其自补偿

Temperature characteristics of quartz resonant force sensors and self temperature compensation

石英谐振式力传感器的温度特性是实际应用中一个需重点考虑的性能参数。本文通过分析石英晶体谐振器在基频谐振与三次谐波振动下所表现出的不同频率——温度特性，对石英谐振式力传感器的相应温度特性进行了分析研究，并提出了传感器温度特性的自补偿方法。实验结果表明，同时测量同一传感器在不同振动模式下的频率，可在一定精度上实现传感器工作温度的自测，从而可在不另增加测温元件的条件下实现传感器温度特性的补偿。

? Temperature characteristics of a quartz resonant force sensor are important features which should be considered seriously in the sensor's practical application. This paper analyzes the temperature characteristic of a quartz resonant force sensor, and presents a self temperature compensation method for the sensor by analyzing the different temperature characteristics when the quartz resonator vibrates in its fundamental mode and its third overtone mode. Experimental results show that the sensor's self temperature measuring can be realized by simulatneously testing its frequencies of different modes and as a result, the sensor's temperature compensation can be achieved without applying another temperature testing cell.