紫外可见分光光度法测定铜及铜合金抛光液中的硝酸根

Measurement of Nitrate in Polishing Fluid for Copper and Copper Alloy by UV-Vis Spectroscopy

研究了紫外可见分光光度计在301.7nm处测定铜及铜合金抛光液中硝酸根的浓度。方法的线性范围为0.9662—9.6621g/L,适合于该类型抛光液中硝酸根的检测。该方法快速简便、准确度高、精密度好。

The amount of nitrate in copper and copper alloy polishing fluid was determined by ultraviolet-visible spectrophotometer at the wave length of 301.7nm.The detection range is from 0.9662 to 9.6621g/L.The method is simple,rapid,accurate and precise,and fits for measuring the nitrate in this kind of polishing fluid.