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Formation mechanism of ordered stress-relief patterns in a free sustained Cu film system

Formation mechanism of ordered stress-relief patterns in a free sustained Cu film system
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摘要 A nearly free sustained copper (Cu) film system has been successfully fabricated by thermal evaporation deposition of Cu atoms on silicone oil surfaces, and a characteristic ordered pattern has been systematically studied. The ordered pattern, namely, band, is composed of a large number of parallel key-formed domains with different width w but nearly uniform length L; its characteristic values of w and L are very susceptible to the growth period, deposition rate and nominal film thickness. The formation mechanism of the ordered patterns is well explained in terms of the relaxation of the internal stress in the films, which is related to the nearly zero adhesion of the solid-liquid interface. By using a two-time deposition method, it is confirmed that the ordered patterns really form in the vacuum chamber. A nearly free sustained copper (Cu) film system has been successfully fabricated by thermal evaporation deposition of Cu atoms on silicone oil surfaces, and a characteristic ordered pattern has been systematically studied. The ordered pattern, namely, band, is composed of a large number of parallel key-formed domains with different width w but nearly uniform length L; its characteristic values of w and L are very susceptible to the growth period, deposition rate and nominal film thickness. The formation mechanism of the ordered patterns is well explained in terms of the relaxation of the internal stress in the films, which is related to the nearly zero adhesion of the solid-liquid interface. By using a two-time deposition method, it is confirmed that the ordered patterns really form in the vacuum chamber.
机构地区 Department of Physics
出处 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第2期669-673,共5页 中国物理B(英文版)
基金 Project supported by the National Natural Science Foundation of China (Grant No 10574109) the Zhejiang Provincial Science and Technology Department (Grant No 2005C24008) the Zhejiang Provincial Natural Science Foundation (Grant No.Y604064)
关键词 ordered pattern thin film internal stress ordered pattern, thin film, internal stress
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