一种从器件三维实体到工艺版图的MEMS CAD技术

A MEMS CAD Methodology from 3D Model to 2D Mask Layout

研究了标准三维实体文件和版图文件的格式,在此基础上提出了一种在MEMS CAD中从三维实体到工艺版图的转换方法,实现了直接基于文件到文件的三维实体到工艺版图的转换,使用C++语言开发了相应的转换接口。通过典型MEMS器件---微机械加速度计和微机械陀螺的多种结构,验证了三维实体到二维版图转换的可行性与效率。结果表明,这种转换方法切实可行,且效率较高,为实现MEMS自顶向下与基于任意流程的设计方法、简化版图绘制、提高设计效率提供了一种有效的途径。

A transfer methodology from 3D model to 2D mask layout in MEMS CAD field was put forward after studied respectively the format of the standard 3D model file and the 2D mask layout file. The direct file--to-file＇s transfer procedure from 3D model to 2D mask layout was realized, and the corresponding interface has been developed in C＋＋ programming language. Finally, the feasibility and the efficiency was validated by the structures of typical MEMS devices-micro accelerator and micro gyroscope, the result shows that the methodology is feasible and highly efficient, which provides a efficient approach for realizing MEMS top-down and discretional flow design, simplifying the process of drawing the mask lavout.