C_(60)/Pd 多层膜TEM研究

TEM Study of C 60 /Pd Multilayers

通过蒸发和磁控溅射镀膜的方法，交替沉积Ｃ６０和金属Ｐｄ膜，制备了不同周期和厚度比的Ｃ６０／Ｐｄ多层膜。利用透射电子显微术（ＴＥＭ）研究了这些薄膜退火前后的结构。

C 60 /Pd multilayers with various periods were prepared in vacuum by evaporating and sputtering alternately. Both structural properties of as deposited and annealed multilayers have been studied with transmission electron microscopy(TEM).