利用 CVD 方法制备金刚石冷阴极的研究

Preparation of Diamond Cold Cathode by CVD Technique

利用化学腐蚀方法制备硅微尖阵列，利用ＭＷ－ＰＣＶＤ工艺生长金刚石膜，利用扫描电镜（ＳＥＭ），Ｘ射线衍射初步研究了金刚石膜的性质。表明微尖尖端具有成核优势，金刚石膜择优沿〈１１１〉方向生长。

The tip arrays were fabricated by etching using non preferential etching mixture solution,and diamond films were deposited on the tip arrays by MW PCVD techniuqe. The diamond was preferentially grown on the top of tips,and diamond films with 〈111〉 orientation were only formed.