摘要
介绍由步进电机驱动的点、位闭环控制系统的硬件与软件设计方法。对该系统的定位精度、重复定位精度进行了测试，结果为：其定位误差、重复定位误差达到２μｍ；与开环系统相比。
This paper introduces the method of software/hardware design of a point to point closed loop control system driven by stepping motors. Tests have been made for this system's position finding precision and repetition position finding precision with a result of 2 μm error. The position finding precision and repetition position finding precision are raised 20 and 10 times seperately in comparison with those of the open loop system.
关键词
步进电机
光栅传感器
点位闭环控制
open loop/closed loop control, stepping motor, grating sensor
