应用纳米压痕法测量电沉积镍镀层残余应力的研究

Measurement Study of Residual Stress in Electrodeposited Nickel Coating by Instrumented Nanoindentation

应用纳米压痕法测量残余应力的2种理论模型对5种电沉积镍镀层中的残余应力在不同压痕深度处进行了测量,并与X射线衍射法的测量结果进行了比较。结果表明,压深位于薄膜/基底界面处的2种压痕法测量结果与X射线衍射法的测量结果相近,且Yun-Hee模型与其符合得更好。

Residual stresses in five kinds of nickel coatings are determined by instrumented nanoindentation according to two kinds of theory models. The measurement results are compared with those of XRD method. It is found that the results of depth at the interface of film/substrate systems are in good agreement with those of XRD method analytical results. Relative to Suresh model, Yun-Hee model lead the results to be more consistent with those shown in XRD measurement.