摘要
综述了近期国内外金属氧化物半导体气教传感器的研究和开发进展；阐述了半导体气敏材料的气敏作用及机理；展望了今后半导体气敏传感器技术的发展趋向。
This paper summarizes recent development and studies of metal Oxide semiconductor gas sensors at home and abroad. The gas sensing mechanisms of metal oxide gas sensors are described. The technology develop-ment trends of metal oxide gas sensors are also discussed.
出处
《化工生产与技术》
CAS
1997年第2期29-34,共6页
Chemical Production and Technology
关键词
金属氧化物
气敏传感器
半导体
metal oxide, gas sensors, development and studies
