电子探针背景扣除和谱线干扰修正方法的进展

Progress in Background Subtraction and Spectral Interference Correction in Electron Probe Microanalysis

对提高电子探针分析精度和分辨本领的关键和难点——背景扣除和重叠峰修正的理论和方法发展进行了综述。介绍了避免谱线干扰的方法和计算谱线干扰量的主要算法及软件应用效果,包括估计干扰因子法、模拟元素谱图法、最小二乘方拟合法及谱线去卷积运算法。讨论了分析中的背景来源及非线性背景扣除的理论和方法发展,并对背景和谱线干扰修正的发展前景进行了展望。引用文献62篇。

Background subtraction and interference correction are the crucial processes to improve the precision and the resolving power of the electron microprobe analyzer. So the theories and methods involved the two processing issues were reviewed in this paper. The methods, software and corresponding effects about interference correction were summarized, which includes the methods of estimate interference factor, elemental simulating spectrum, least-square fitting and spectral deconvolution, etc. The emphasis was focused on the origins of background, as well as the development of the theories and methods for the non-linear background correction. Moreover, a brief prospect was predicted about the methods of background correction and interference correction. 62 references were cited.