摘要
采用溶胶-凝胶法制备MgO-Al2O3-SiO2系低温共烧陶瓷(LTCC)基板粉料的先驱体,经700℃焙烧制得LTCC基板粉体,在850、900℃下烧结成LTCC基板样品。研究样品的相结构、微观结构、介电性能等。结果表明,样品含有多种晶相,微观结构为孤岛结构和柱状晶结构,介电常数、介电损耗、绝缘电阻、密度基本符合LTCC基板要求。
LTCC precursor of MgO-Al2O3-SiO2 system prepared by sol-gel method was calcined at 700℃ for 2h to obtain the LTCC substrate powder. Then the powder was sintered at 850,900℃ to obtain LTCC substrate samples. Studied the phase structure, microstructure, dielectrical properties,and so in. The results show that there are many kinds of phases in all samples; the microstructure are an isolated island structure and columnar crystal structure; dielectric constant, dielectric dissipation factor, insulation resistance and density mainly meet the requirements of the LTCC substrate.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2008年第1期72-74,78,共4页
Journal of Functional Materials