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溶胶-凝胶法制备MgO-Al_2O_3-SiO_2系LTCC基板材料及其结构性能研究 被引量：4

Study of structure and properties of LTCC of MgO-Al_2O_3-SiO_2 system by sol-gel method
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摘要 采用溶胶-凝胶法制备MgO-Al2O3-SiO2系低温共烧陶瓷(LTCC)基板粉料的先驱体,经700℃焙烧制得LTCC基板粉体,在850、900℃下烧结成LTCC基板样品。研究样品的相结构、微观结构、介电性能等。结果表明,样品含有多种晶相,微观结构为孤岛结构和柱状晶结构,介电常数、介电损耗、绝缘电阻、密度基本符合LTCC基板要求。 LTCC precursor of MgO-Al2O3-SiO2 system prepared by sol-gel method was calcined at 700℃ for 2h to obtain the LTCC substrate powder. Then the powder was sintered at 850,900℃ to obtain LTCC substrate samples. Studied the phase structure, microstructure, dielectrical properties,and so in. The results show that there are many kinds of phases in all samples; the microstructure are an isolated island structure and columnar crystal structure; dielectric constant, dielectric dissipation factor, insulation resistance and density mainly meet the requirements of the LTCC substrate.
作者 张昭瑞 纪箴 王燕斌
机构地区 北京科技大学材料物理与化学系
出处 《功能材料》 EI CAS CSCD 北大核心 2008年第1期72-74,78,共4页 Journal of Functional Materials
关键词 MgO-Al2O3-SiO2系 LTCC 溶胶-凝胶法 MgO-Al2O3-SlO2 LTCC sol-gel method
分类号 TQ171 [化学工程—玻璃工业]
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